JPH0334062U - - Google Patents
Info
- Publication number
- JPH0334062U JPH0334062U JP9363189U JP9363189U JPH0334062U JP H0334062 U JPH0334062 U JP H0334062U JP 9363189 U JP9363189 U JP 9363189U JP 9363189 U JP9363189 U JP 9363189U JP H0334062 U JPH0334062 U JP H0334062U
- Authority
- JP
- Japan
- Prior art keywords
- discharge plasma
- frequency discharge
- supplied
- counter electrode
- bias voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363189U JPH0334062U (en]) | 1989-08-09 | 1989-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363189U JPH0334062U (en]) | 1989-08-09 | 1989-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334062U true JPH0334062U (en]) | 1991-04-03 |
Family
ID=31642999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9363189U Pending JPH0334062U (en]) | 1989-08-09 | 1989-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334062U (en]) |
-
1989
- 1989-08-09 JP JP9363189U patent/JPH0334062U/ja active Pending